TY - GEN
T1 - A 2000-Volumes/s 3D Ultrasound Imaging Chip with Monolithically-Integrated 11.7×23.4mm2 2048-Element CMUT Array and Arbitrary-Wave TX Beamformer
AU - Rozsa, Nuriel N.M.
AU - Chen, Zhao
AU - Kim, Taehoon
AU - Guo, Peng
AU - Hopf, Yannick
AU - Voorneveld, Jason
AU - Santos, Djalma Simoes Dos
AU - Noothout, Emile
AU - Chang, Zu Yao
AU - Chen, Chao
AU - Henneken, Vincent A.
AU - De Jong, Nico
AU - Vos, Hendrik J.
AU - Bosch, Johan G.
AU - Verweij, Martin D.
AU - Pertijs, Michiel A.P.
N1 - Publisher Copyright: © 2024 IEEE.
PY - 2024/8/26
Y1 - 2024/8/26
N2 - This work presents an ultrasound imaging chip with a monolithically integrated 32×64 element CMUT array, capable of imaging a large 60°×60°×10 cm field-of-view (Fo V) at 2000 vol/s, the highest 3D volume rate reported to date. By combining 2x time-division multiplexing (TDM) with 2×2-element micro-beamforming, it reduces the output channel-count 8x. Equalization (EQ), trained using a pseudo-random bit-sequence (PRBS) generated on-chip, reduces TDM-induced crosstalk by 19 dB, enabling power-efficient scaling of the cable drivers. A novel transmit (TX) beamformer, implemented as a programmable digital pipeline, enables arbitrary TX beamforming with arbitrary pulse-density modulated (PDM) waveforms and drives element-level 65 V unipolar pulsers. The chip features a layout matched to the 365-um-pitch CMUT array, and consumes 1.30 mW/ch.
AB - This work presents an ultrasound imaging chip with a monolithically integrated 32×64 element CMUT array, capable of imaging a large 60°×60°×10 cm field-of-view (Fo V) at 2000 vol/s, the highest 3D volume rate reported to date. By combining 2x time-division multiplexing (TDM) with 2×2-element micro-beamforming, it reduces the output channel-count 8x. Equalization (EQ), trained using a pseudo-random bit-sequence (PRBS) generated on-chip, reduces TDM-induced crosstalk by 19 dB, enabling power-efficient scaling of the cable drivers. A novel transmit (TX) beamformer, implemented as a programmable digital pipeline, enables arbitrary TX beamforming with arbitrary pulse-density modulated (PDM) waveforms and drives element-level 65 V unipolar pulsers. The chip features a layout matched to the 365-um-pitch CMUT array, and consumes 1.30 mW/ch.
UR - http://www.scopus.com/inward/record.url?scp=85203601808&partnerID=8YFLogxK
U2 - 10.1109/VLSITechnologyandCir46783.2024.10631363
DO - 10.1109/VLSITechnologyandCir46783.2024.10631363
M3 - Conference proceeding
AN - SCOPUS:85203601808
T3 - Digest of Technical Papers - Symposium on VLSI Technology
BT - 2024 IEEE Symposium on VLSI Technology and Circuits, VLSI Technology and Circuits 2024
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2024 IEEE Symposium on VLSI Technology and Circuits, VLSI Technology and Circuits 2024
Y2 - 16 June 2024 through 20 June 2024
ER -