| Original language | Undefined/Unknown |
|---|---|
| Title of host publication | Sensor technology 2001, proceedings of the sensor technology conference 2001 |
| Editors | M. Elwenspoek |
| Place of Publication | Amsterdam |
| Pages | 119-124 |
| Number of pages | 6 |
| Publication status | Published - 2001 |
Research programs
- EMC MM-03-32-05
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