Frequency Tuning of Collapse-Mode Capacitive Micromachined Ultrasonic Transducer

M (Martin) Peka?, WU Dittmer, N Mihajlovic, Gijs van Soest, Nico Jong

Research output: Contribution to journalArticleAcademicpeer-review

23 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)144-152
Number of pages9
JournalUltrasonics
Volume74
DOIs
Publication statusPublished - 2017

Research programs

  • EMC COEUR-09

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