Frequency Tuning of Collapse-Mode Capacitive Micromachined Ultrasonic Transducer

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@article{23eee1718a2c4ba3b21e1f8e34e2a021,

title = "Frequency Tuning of Collapse-Mode Capacitive Micromachined Ultrasonic Transducer",

author = "Peka?, \{M (Martin)\} and WU Dittmer and N Mihajlovic and \{van Soest\}, Gijs and Nico Jong",

year = "2017",

doi = "10.1016/j.ultras.2016.10.002",

language = "Undefined/Unknown",

volume = "74",

pages = "144--152",

journal = "Ultrasonics",

issn = "0041-624X",

publisher = "Elsevier",

}

TY - JOUR

T1 - Frequency Tuning of Collapse-Mode Capacitive Micromachined Ultrasonic Transducer

AU - Peka?, M (Martin)

AU - Dittmer, WU

AU - Mihajlovic, N

AU - van Soest, Gijs

AU - Jong, Nico

PY - 2017

Y1 - 2017

U2 - 10.1016/j.ultras.2016.10.002

DO - 10.1016/j.ultras.2016.10.002

M3 - Article

C2 - 27780034

SN - 0041-624X

VL - 74

SP - 144

EP - 152

JO - Ultrasonics

JF - Ultrasonics

ER -