TY - JOUR
T1 - On the longevity and inherent hermeticity of silicon-ICs
T2 - evaluation of bare-die and PDMS-coated ICs after accelerated aging and implantation studies
AU - Nanbakhsh, Kambiz
AU - Shah Idil, Ahmad
AU - Lamont, Callum
AU - Dücső, Csaba
AU - Akgun, Ömer Can
AU - Horváth, Domonkos
AU - Tóth, Kinga
AU - Meszéna, Domokos
AU - Ulbert, István
AU - Mazza, Federico
AU - Constandinou, Timothy G.
AU - Serdijn, Wouter
AU - Vanhoestenberghe, Anne
AU - Donaldson, Nick
AU - Giagka, Vasiliki
N1 - Publisher Copyright: © The Author(s) 2024.
PY - 2025/1/2
Y1 - 2025/1/2
N2 - Silicon integrated circuits (ICs) are central to the next-generation miniature active neural implants, whether packaged in soft polymers for flexible bioelectronics or implanted as bare die for neural probes. These emerging applications bring the IC closer to the corrosive body environment, raising reliability concerns, particularly for chronic use. Here, we evaluate the inherent hermeticity of bare die ICs, and examine the potential of polydimethylsiloxane (PDMS), a moisture-permeable elastomer, as a standalone encapsulation material. For this aim, the electrical and material performance of ICs sourced from two foundries was evaluated through one-year accelerated in vitro and in vivo studies. ICs featured custom-designed test structures and were partially PDMS coated, creating two regions on each chip, uncoated “bare die” and “PDMS-coated”. During the accelerated in vitro study, ICs were electrically biased and periodically monitored. Results revealed stable electrical performance, indicating the unaffected operation of ICs even when directly exposed to physiological fluids. Despite this, material analysis revealed IC degradation in the bare regions. PDMS-coated regions, however, revealed limited degradation, making PDMS a suitable IC encapsulant for years-long implantation. Based on the new insights, guidelines are proposed that may enhance the longevity of implantable ICs, broadening their applications in the biomedical field.
AB - Silicon integrated circuits (ICs) are central to the next-generation miniature active neural implants, whether packaged in soft polymers for flexible bioelectronics or implanted as bare die for neural probes. These emerging applications bring the IC closer to the corrosive body environment, raising reliability concerns, particularly for chronic use. Here, we evaluate the inherent hermeticity of bare die ICs, and examine the potential of polydimethylsiloxane (PDMS), a moisture-permeable elastomer, as a standalone encapsulation material. For this aim, the electrical and material performance of ICs sourced from two foundries was evaluated through one-year accelerated in vitro and in vivo studies. ICs featured custom-designed test structures and were partially PDMS coated, creating two regions on each chip, uncoated “bare die” and “PDMS-coated”. During the accelerated in vitro study, ICs were electrically biased and periodically monitored. Results revealed stable electrical performance, indicating the unaffected operation of ICs even when directly exposed to physiological fluids. Despite this, material analysis revealed IC degradation in the bare regions. PDMS-coated regions, however, revealed limited degradation, making PDMS a suitable IC encapsulant for years-long implantation. Based on the new insights, guidelines are proposed that may enhance the longevity of implantable ICs, broadening their applications in the biomedical field.
UR - https://www.scopus.com/pages/publications/85213955905
U2 - 10.1038/s41467-024-55298-4
DO - 10.1038/s41467-024-55298-4
M3 - Article
C2 - 39746983
AN - SCOPUS:85213955905
SN - 2041-1723
VL - 16
JO - Nature Communications
JF - Nature Communications
IS - 1
M1 - 12
ER -